Iranian Nanotechnology Society International Journal of Nanoscience and Nanotechnology 1735-7004 14 2 2018 05 01 A Short Review on Fabrication Methods of Micro-Cantilever for Ionic Electroactive Polymer Sensors/Actuators 101 109 31218 EN M. H. Ghajar Departement of Mechanical Engineering, University of Tehran, Tehran, Iran. M. Mousavi Departement of Mechanical Engineering, University of Tehran, Tehran, Iran. S. Burzhuev Waterloo Institute for Nanotechnology, University of Waterloo, Waterloo, Canada. M. Irannejad Waterloo Institute for Nanotechnology, University of Waterloo, Waterloo, Canada. M. Yavuz2 Waterloo Institute for Nanotechnology, University of Waterloo, Waterloo, Canada. E. Abdel-Rahman Waterloo Institute for Nanotechnology, University of Waterloo, Waterloo, Canada. Journal Article 2017 09 16 <em>   Micro-electroactive polymers have wide applications from industry to healthcare. Artificial muscles, microvalves, microswitches, haptic sensing, blood pressure and pulse monitoring are some potential applications for micro-electroactive polymers. The most advantage of micro-electroactive polymers as sensors and actuators is bio-compatibility and low power threshold for large deformations. In this short review, some applicable fabrication methods of micro-electroactive polymer cantilever are reviewed. Furthermore, a novel method based on standard micro fabrication techniques is designed and discussed in details which presents a conceptual design of a micro-electroactive polymer cantilever on a polymeric anchor located on a silicon substrate for future works.</em> https://www.ijnnonline.net/article_31218_b5026aa7758dc0e6f85ddb75f754ed14.pdf