1
Departement of Mechanical Engineering, University of Tehran, Tehran, Iran.
2
Waterloo Institute for Nanotechnology, University of Waterloo, Waterloo, Canada.
Abstract
Micro-electroactive polymers have wide applications from industry to healthcare. Artificial muscles, microvalves, microswitches, haptic sensing, blood pressure and pulse monitoring are some potential applications for micro-electroactive polymers. The most advantage of micro-electroactive polymers as sensors and actuators is bio-compatibility and low power threshold for large deformations. In this short review, some applicable fabrication methods of micro-electroactive polymer cantilever are reviewed. Furthermore, a novel method based on standard micro fabrication techniques is designed and discussed in details which presents a conceptual design of a micro-electroactive polymer cantilever on a polymeric anchor located on a silicon substrate for future works.
Ghajar, M. H., Mousavi, M., Burzhuev, S., Irannejad, M., Yavuz2, M., & Abdel-Rahman, E. (2018). A Short Review on Fabrication Methods of Micro-Cantilever for Ionic Electroactive Polymer Sensors/Actuators. International Journal of Nanoscience and Nanotechnology, 14(2), 101-109.
MLA
M. H. Ghajar; M. Mousavi; S. Burzhuev; M. Irannejad; M. Yavuz2; E. Abdel-Rahman. "A Short Review on Fabrication Methods of Micro-Cantilever for Ionic Electroactive Polymer Sensors/Actuators". International Journal of Nanoscience and Nanotechnology, 14, 2, 2018, 101-109.
HARVARD
Ghajar, M. H., Mousavi, M., Burzhuev, S., Irannejad, M., Yavuz2, M., Abdel-Rahman, E. (2018). 'A Short Review on Fabrication Methods of Micro-Cantilever for Ionic Electroactive Polymer Sensors/Actuators', International Journal of Nanoscience and Nanotechnology, 14(2), pp. 101-109.
VANCOUVER
Ghajar, M. H., Mousavi, M., Burzhuev, S., Irannejad, M., Yavuz2, M., Abdel-Rahman, E. A Short Review on Fabrication Methods of Micro-Cantilever for Ionic Electroactive Polymer Sensors/Actuators. International Journal of Nanoscience and Nanotechnology, 2018; 14(2): 101-109.