TY - JOUR
ID - 6113
TI - Analysis of Frequency Leakage in Different Optical Paths of Nano-Metrology Systems Based on Frequency-Path Models
JO - International Journal of Nanoscience and Nanotechnology
JA - IJNN
LA - en
SN - 1735-7004
AU - Olyaee, S.
AU - Dashtban, Z.
AD - Nano-Photonics and Optoelectronics Research Laboratory (NORLab), Shahid Rajaee Teacher Training
University (SRTTU), Lavizan, Tehran, I. R. Iran
Y1 - 2014
PY - 2014
VL - 10
IS - 2
SP - 79
EP - 96
KW - Frequency-path model
KW - Interference terms
KW - Heterodyne interferometer
KW - Nano-metrology
KW - Frequency
spectrum
DO -
N2 - The drawing of frequency-path (F-P) models of optical beams is an approach for nonlinearity analysis in nano-metrology systems and sensors based on the laser interferometers. In this paper, the frequency-path models of four nano-metrology laser interferometry systems are designed, analyzed and simulated, including conventional and modified two- and three-longitudinal-mode laser interferometers. The frequency-path model can be used for nonlinearity error analysis resulting from imperfect alignment of optical head and non-ideal laser polarization states. The number of active F-P element in these systems is calculated by multiplying the number of frequency and paths. The number of active F-P elements for conventional and modified two-mode laser interferometer is 4, and this is 6 for conventional and modified three-mode laser interferometer. The output interference terms can be calculated from the active F-P elements which is 10 for conventional and modified two-mode interferometer and is 21 for conventional and modified three-mode one. The interference terms include optical power, ac interference, dc interference, and ac reference. These terms are also investigated in zero (fixed target), low (2mm/s), and high (20mm/s) target velocities using frequency spectrum of photocurrents.
UR - http://www.ijnnonline.net/article_6113.html
L1 - http://www.ijnnonline.net/article_6113_2ad1a91b254b2e92de4fd174d5a326de.pdf
ER -