Nano-Photonics and Optoelectronics Research Laboratory (NORLab), Shahid Rajaee Teacher Training University (SRTTU), Lavizan, Tehran, I. R. Iran
Abstract
The drawing of frequency-path (F-P) models of optical beams is an approach for nonlinearity analysis innano-metrology systems and sensors based on the laser interferometers. In this paper, the frequency-pathmodels of four nano-metrology laser interferometry systems are designed, analyzed and simulated, includingconventional and modified two- and three-longitudinal-mode laser interferometers. The frequency-path modelcan be used for nonlinearity error analysis resulting from imperfect alignment of optical head and non-ideallaser polarization states. The number of active F-P element in these systems is calculated by multiplying thenumber of frequency and paths. The number of active F-P elements for conventional and modified two-modelaser interferometer is 4, and this is 6 for conventional and modified three-mode laser interferometer. The outputinterference terms can be calculated from the active F-P elements which is 10 for conventional and modifiedtwo-mode interferometer and is 21 for conventional and modified three-mode one. The interference termsinclude optical power, ac interference, dc interference, and ac reference. These terms are also investigated inzero (fixed target), low (2mm/s), and high (20mm/s) target velocities using frequency spectrum of photocurrents.
Olyaee, S., & Dashtban, Z. (2014). Analysis of Frequency Leakage in Different Optical Paths of Nano-Metrology Systems Based on Frequency-Path Models. International Journal of Nanoscience and Nanotechnology, 10(2), 79-96.
MLA
S. Olyaee; Z. Dashtban. "Analysis of Frequency Leakage in Different Optical Paths of Nano-Metrology Systems Based on Frequency-Path Models". International Journal of Nanoscience and Nanotechnology, 10, 2, 2014, 79-96.
HARVARD
Olyaee, S., Dashtban, Z. (2014). 'Analysis of Frequency Leakage in Different Optical Paths of Nano-Metrology Systems Based on Frequency-Path Models', International Journal of Nanoscience and Nanotechnology, 10(2), pp. 79-96.
VANCOUVER
Olyaee, S., Dashtban, Z. Analysis of Frequency Leakage in Different Optical Paths of Nano-Metrology Systems Based on Frequency-Path Models. International Journal of Nanoscience and Nanotechnology, 2014; 10(2): 79-96.